NANOLITHOGRAPHY WITH LASER FOCUSED ATOMIC BEAMS

Laser focusing of neutral atoms into a periodic array of nanometre-scale features has emerged as a promising method of nanostructure fabrication. A laser collimated atomic beam interacting with a near-resonant laser standing-wave created above the substrate is focused into the nodes or the antinodes of the light intensity, depending on the sign of the detuning of the laser frequency from the atomic resonance, thus forming periodic nanostructures. structure.gif (34474 bytes)
The physics of nanostructure fabrication via atom optics involves both atom-laser interactions and surface growth phenomena, making this deposition technique the meeting place of atom physics and surface science. We will present the basic principles of the method, some recent developments and results of our theoretical calculations based on a semiclassical trajectory tracing method and a real-time surface diffusion algorithm and compared them with the experiments conducted with chromium atomic beams. principles.gif (9356 bytes)
The future experimental possibilities are discussed with a special emphasis on using laser focused atomic deposition for studies of surface growth phenomena which are of great fundamental and industrial importance.
 

 

This work is done in collaboration with Experimental Solid State Physics II: